Measurement of silicon carbide epilayer thickness using physics-informed neural networks and hybrid intelligent systems

@article{li2026measurement,
  title = {Measurement of silicon carbide epilayer thickness using physics-informed neural networks and hybrid intelligent systems},
  author = {Chang-Yuan Li and Dengkui Li},
  year = {2026},
  journal = {Intelligence & Robotics},
  doi = {10.20517/ir.2026.23},
  url = {https://doi.org/10.20517/ir.2026.23},
}